Acta Optica Sinica, Volume. 35, Issue 4, 422002(2015)
Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography
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Wang Lei, Li Sikun, Wang Xiangzhao, Yan Guanyong, Yang Chaoxing. Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography[J]. Acta Optica Sinica, 2015, 35(4): 422002
Category: Optical Design and Fabrication
Received: Oct. 24, 2014
Accepted: --
Published Online: Mar. 25, 2015
The Author Email: Lei Wang (wangleizjucn@gmail.com)