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Acta Optica Sinica, Volume. 35, Issue 4, 422002(2015)

Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography

Wang Lei1,2、*, Li Sikun1, Wang Xiangzhao1,2, Yan Guanyong1,2, and Yang Chaoxing1,2
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    Wang Lei, Li Sikun, Wang Xiangzhao, Yan Guanyong, Yang Chaoxing. Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography[J]. Acta Optica Sinica, 2015, 35(4): 422002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 24, 2014

    Accepted: --

    Published Online: Mar. 25, 2015

    The Author Email: Lei Wang (wangleizjucn@gmail.com)

    DOI:10.3788/aos201535.0422002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology