Semiconductor Optoelectronics, Volume. 44, Issue 2, 228(2023)

Research on the Effect of Interface Roughness on Spectral Properties of VUV Optical Thin Film

HUANG Kai1...2, GUO Chun1 and KONG Mingdong1 |Show fewer author(s)
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  • 2[in Chinese]
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    References(14)

    [1] [1] Zhang Lichao, Cai Xikun. High Performance Fluoride Optical Coatings for DUV Cptics[C]// 7th Inter. Symp. on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2014: 26-29.

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    [3] [3] Nichelatti E, Montecchi M, Montereali R M. Optical reflectance and transmittance of a multilayer coating affected by refractive-index inhomogeneity, interface roughness, and thickness wedge[J]. J. of Non-Crystalline Solids, 2009, 355(18/21): 1115-1118.

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    [9] [9] Guo C, Kong M, Gao W, et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. Opt. Lett., 2013, 38(1): 40-42.

    [10] [10] Liu G, Yu H, Zhang W, et al. Comparison study of microstructure, chemical composition and optical properties between resistive heating and electron beam evaporated Laf3 thin films[J]. Thin Solid Films, 2011, 519(11): 3487-3491.

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    HUANG Kai, GUO Chun, KONG Mingdong. Research on the Effect of Interface Roughness on Spectral Properties of VUV Optical Thin Film[J]. Semiconductor Optoelectronics, 2023, 44(2): 228

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    Paper Information

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    Received: Oct. 6, 2021

    Accepted: --

    Published Online: Aug. 14, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2021100601

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