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Acta Photonica Sinica, Volume. 47, Issue 9, 914003(2018)

Etching Process of 980 nm Tapered Semiconductor Laser

QIAO Chuang1...2,*, SU Rui-gong2, FANG Dan1, TANG Ji-long1, FANG Xuan1, WANG Deng-kui1, ZHANG Bao-shun2 and WEI Zhi-peng1 |Show fewer author(s)
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    QIAO Chuang, SU Rui-gong, FANG Dan, TANG Ji-long, FANG Xuan, WANG Deng-kui, ZHANG Bao-shun, WEI Zhi-peng. Etching Process of 980 nm Tapered Semiconductor Laser[J]. Acta Photonica Sinica, 2018, 47(9): 914003

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    Paper Information

    Received: Mar. 22, 2018

    Accepted: --

    Published Online: Sep. 15, 2018

    The Author Email: Chuang QIAO (cqiao2017@sinano.ac.cn)

    DOI:10.3788/gzxb20184709.0914003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology