Optics and Precision Engineering, Volume. 20, Issue 11, 2380(2012)
Groove profile evolution of grating masks for different photoresist response curves in fabrication of holographic gratings
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HAN Jian, Bayanheshig, LI Wen-hao, KONG Peng. Groove profile evolution of grating masks for different photoresist response curves in fabrication of holographic gratings[J]. Optics and Precision Engineering, 2012, 20(11): 2380
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Received: Apr. 7, 2012
Accepted: --
Published Online: Nov. 28, 2012
The Author Email: Jian HAN (hanjian523@163.com)
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