[1] [1] XU Weicai, HUANG Wei, YANG Wang. Magnification tolerancing and compensation for the lithographic projection lens［J］. Acta Optica Sinica, 2011, 31(11): 1122003.

[2] [2] MATSUYAMA T, TANAKA I,OZAWA T, et al.Improving lens performance through the most recent lens manufacturing process［C］. SPIE, 2003, 5040: 801810.

[3] [3] LIU Xiangguo, JIAN Shengyong, LIU Guangcong. Study on preparing method and performances of piezoelectric ceramics actuators with square crossing shape［J］. Piezoelectrics & Acoustooptics, 2011, 33(6): 958960.

[4] [4] PAN Song, HUANG Weiqing, WANG Yin, et al. High efficiency driving of linear motor based on piezoelectric actuator［J］. Optics and Precision Engineering, 2011, 19(10): 24642471.

[5] [5] YU Youlong, TAN Ling, ZOU Ligang, et al. Piezoelectric ceramic characteristics using fiber grating seneor［J］. Acta Photonica Sinica, 2011, 40(7): 994997.

[6] [6] CHEN Hui, TAN Yonghong, ZHOU Xingpeng, et al. Identification and control of dynamic modeling for piezoceramic actuator［J］. Optics and Precision Engineering, 2012, 20(1): 8895.

[7] [7] LAI Zhilin, LIU Xiangdong, GENG Jie, et al. Sliding mode control of hysteresis of piezoceramic actuator based on inverse Preisach compensation［J］. Optics and Precision Engineering, 2011, 19(6): 12811290.

[8] [8] REN Bin, TONG Shoufeng, SONG Yansong, et al. Research on the driving technique of high precision and speedy piezoelectric ceramic transducer in fine tracking system of air laser communication［J］. Chinese Journal of Scientific Instrument, 2011, 32(2): 420425.

[9] [9] WANG Hong, ZHONG Chaowei, ZHANG Shuren. Development of a dynamic driving line power for piezoelectric ceramic actuator［J］. Piezoelectrics & Acoustooptics, 2004, 26(3): 189191.

[10] [10] ZHANG Chao, DUAN Fajie, JIANG Jiajia, et al. Piezoelectric ceramic fiber phase modulation system and its online calibration［J］.OptoElectronic Engineering,2011, 38(6): 8992.

[11] [11] FAN Wei, CUI Changcai, YE Ruifang. The research on PZT power supply temperature control system［J］. Piezoelectrics & Acoustooptics, 2011, 33(6): 946949.

[12] [12] CLINGMAN D J, GAMBLE M. High power piezo drive amplifier for large stack and PFC applications［C］. SPIE, 2001, 4334：345353.

[13] [13] Cirrus.PA85.LIB［EB/OL］.http: //www.cirrus.com/cn/pubs/software/apexpoweropamps_0811.zip.

[14] [14] FRANCO S. Design with operational amplifiers and analog integrated circuits［M］. LIU Shutang, ZHU Maolin, RONG Mei, transl. 3rd ed. Xi′an: Xi′an Jiaotong University Press, 2009.

[15] [15] DORF R C, BISHOP R H. Modern control system［M］. 11th ed. Beijing: Publishing House of Electronics Industry, 2009.