Acta Photonica Sinica, Volume. 41, Issue 9, 1071(2012)
Dynamic Performance of the PZT Driver Used in a Lithographic Objective
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WANG Xueliang, GONG Yan. Dynamic Performance of the PZT Driver Used in a Lithographic Objective[J]. Acta Photonica Sinica, 2012, 41(9): 1071
Paper Information
Received: Apr. 10, 2012
Accepted: --
Published Online: Aug. 31, 2012
The Author Email: Xueliang WANG (wangxueliang@ciomp.ac.cn)
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