The dynamic performance of a PZT driver which contains an operational amplifier was studied according to the specific requirements of the image quality compensator in a lithographic objective. Firstly, the impact of the inherent frequency characteristics of the operational amplifier on dynamic performance was analyzed and the parameters of the compensatory network were fixed. Secondly, the impact of the capacitive load of the driver system on dynamic performance was analyzed and the corresponding solution was provided. Finally, the impact of the parasitic capacitance in the driver system was discussed. As calculated, after compensated the PZT driver system had a phase margin of 79 degrees and a setting time of 5 microseconds, and presented no overshoot in step response. The driver would fulfill the dynamic requirements of strong stability, rapid response and little overshoot when the PZT was used as actuator of the image quality compensator in a lithographic objective.