[1] [1] BINNIG G, QUATE C F, GERBER C. Atomic force microscope［J］. Physical Review Letters, 1986, 56(9): 930-933.

[2] [2] DANZEBRINK H U, KOENDERS L, WILKENING G, et al. Advances in scanning force microscopy for dimensional metrology［J］. CIRP Annals, 2006, 55(2): 841-878.

[3] [3] MARINELLO F. Atomic force microscopy［M］.//CIRP Encyclopedia of Production Engineering. Berlin: Springer Heidelberg, 2016.

[4] [4] WANG Z L, SONG J J. Piezoelectric nanogenerators based on zinc oxide nanowire arrays［J］. Science, 2006, 312(5771): 242-246.

[5] [5] Wu S. AFM based manipulation and mechanical properties measurement of one-dimensional nanomaterials［D］. Tianjin: Tianjin University, 2011. (in Chinese)

[6] [6] ALSTEENS D, GAUB H E, NEWTON R, et al.. Atomic force microscopy-based characterization and design of biointerfaces［J］. Nature Reviews Materials, 2017, 2(5): 17008.

[7] [7] FANTNER G E, SCHITTER G, KINDT J H, et al.. Components for high speed atomic force microscopy［J］. Ultramicroscopy, 2006, 106(8-9): 881-887.

[8] [8] ANDO T, UCHIHASHI T, KODERA N. High-speed atomic force microscopy［J］. Japanese Journal of Applied Physics, 2012, 51(8S3): 08KA02.

[9] [9] ZHAO J Y, CAI W, SHANG G Y. Progress in high-speed atomic force microscopy［J］. Journal of Chinese Electron Microscopy Society, 2013, 32(1): 81-89. (in Chinese)

[10] [10] SCHITTER G, THURNER P J, HANSMA P K. Design and input-shaping control of a novel scanner for high-speed atomic force microscopy［J］. Mechatronics, 2008, 18(5-6): 282-288.

[11] [11] SHITTER G, STRM K J, DE MARTINI B E, et al.. Design and modeling of a high-speed AFM-scanner［J］. IEEE Transaction on Control Systems Technology, 2007, 15(5): 906-915.

[12] [12] BOZCHALOOI I S, HOUCK A C, ALGHAMDI J M, et al.. Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging［J］. Ultramicroscopy, 2016, 160: 213-224.

[13] [13] YOUCEF-TOUMI K, BOZCHALOOI I S, HOUCK A C. Multi-actuator design and control for a high-speed/large-range nanopositioning system［P］. U. S. Patent 9397587. 2016-07-16.

[14] [14] UCHIHASHI T, KODERA N, ANDO T. Guide to video recording of structure dynamics and dynamic processes of proteins by high-speed atomic force microscopy［J］. Nature Protocols, 2012, 7(6): 1193-1206.

[15] [15] SCHITTER G, ROST M J. Scanning probe microscopy at video-rate［J］. Materials Today, 2008, 11(S1): 40-48.

[16] [16] FUKUDA S, UCHIHASHI T, ANDO T. Method of mechanical holding of cantilever chip for tip-scan high-speed atomic force microscope［J］. Review of Scientific Instruments, 2015, 86(6): 063703.

[17] [17] FUKUDA S, UCHIHASHI T, IINO R, et al.. High-speed atomic force microscope combined with single-molecule fluorescence microscope［J］. Review of Scientific Instruments, 2013, 84(7): 073706.

[18] [18] YIN B H, CHEN D X, LIN Y SH, et al.. Design of AFM system with high speed and large scanning range［J］. Opt. Precision Eng., 2011, 19(11): 2651-2656. (in Chinese)

[19] [19] CHEN D X, YIN B H, LIN Y SH, et al.. Feed-forward and feed-back controller for large-range and high-speed AFM［J］. Opt. Precision Eng., 2011, 19(4): 836-843. (in Chinese)

[20] [20] ZHAO J Y, GONG W T, CAI W, et al.. Piezoelectric bimorph-based scanner in the tip-scan mode for high speed atomic force microscope［J］. Review of Scientific Instruments, 2013, 84(8): 083706.

[21] [21] CAI W, ZHAO J Y, GONG W T, et al.. Resonance-type bimorph-based high-speed atomic force microscopy: real-time imaging and distortion correction［J］. Measurement Science and Technology, 2014, 25(12): 125404.

[22] [22] WU S, HU X D, HU X T, et al.. A scanning head of atomic force microscope with a tracking optical beam lever［P］. China: ZL201310514419.4, 2013-10-28. (in Chinese)

[23] [23] WU S, HU X D, XU L Y, et al.. An atomic force microscope system for high speed scanning［P］.China: ZL201510089015.4, 2015-02-27. (in Chinese)