Optics and Precision Engineering, Volume. 26, Issue 3, 662(2018)
Design of high-speed atomic force microscope with a separated X-scanner
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LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662
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Received: Jun. 23, 2017
Accepted: --
Published Online: Apr. 25, 2018
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