Acta Optica Sinica, Volume. 36, Issue 4, 422004(2016)
Research on Deformation and Aberration of Active Plate Used in Lithographic Objective
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Yao Changcheng, Gong Yan. Research on Deformation and Aberration of Active Plate Used in Lithographic Objective[J]. Acta Optica Sinica, 2016, 36(4): 422004
Category: Optical Design and Fabrication
Received: Oct. 12, 2015
Accepted: --
Published Online: Apr. 5, 2016
The Author Email: Changcheng Yao (yaochangcheng18@126.com)