Acta Optica Sinica, Volume. 36, Issue 4, 422004(2016)
Research on Deformation and Aberration of Active Plate Used in Lithographic Objective
Get Citation
Copy Citation Text
Yao Changcheng, Gong Yan. Research on Deformation and Aberration of Active Plate Used in Lithographic Objective[J]. Acta Optica Sinica, 2016, 36(4): 422004
Category: Optical Design and Fabrication
Received: Oct. 12, 2015
Accepted: --
Published Online: Apr. 5, 2016
The Author Email: Changcheng Yao (yaochangcheng18@126.com)