Optics and Precision Engineering, Volume. 19, Issue 8, 1810(2011)
Process of spherical photoresist spin coating
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LIU Xiao-han, FENG Xiao-guo, ZHAO Jing-li, GAO Jin-song, ZHANG Hong-sheng, CHENG Zhi-feng. Process of spherical photoresist spin coating[J]. Optics and Precision Engineering, 2011, 19(8): 1810
Paper Information
Category:
Received: Dec. 2, 2010
Accepted: --
Published Online: Aug. 29, 2011
The Author Email: Xiao-han LIU (liuxiaohanciomp@sohu.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20