Acta Optica Sinica, Volume. 33, Issue 6, 631001(2013)

Accurate EPMA/WDS Measurement of Aluminium Composition in AlxGa1-xN Crystal Film

Liu Yunchuan*, Zhou Yanping, Wang Xuerong, Meng Xiangyan, Duan Jian, and Zheng Huibao
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    References(13)

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    Liu Yunchuan, Zhou Yanping, Wang Xuerong, Meng Xiangyan, Duan Jian, Zheng Huibao. Accurate EPMA/WDS Measurement of Aluminium Composition in AlxGa1-xN Crystal Film[J]. Acta Optica Sinica, 2013, 33(6): 631001

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    Paper Information

    Category: Thin Films

    Received: Jan. 18, 2013

    Accepted: --

    Published Online: May. 14, 2013

    The Author Email: Yunchuan Liu (liuyuncuan@sina.com)

    DOI:10.3788/aos201333.0631001

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