Acta Optica Sinica, Volume. 33, Issue 6, 631001(2013)
Accurate EPMA/WDS Measurement of Aluminium Composition in AlxGa1-xN Crystal Film
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Liu Yunchuan, Zhou Yanping, Wang Xuerong, Meng Xiangyan, Duan Jian, Zheng Huibao. Accurate EPMA/WDS Measurement of Aluminium Composition in AlxGa1-xN Crystal Film[J]. Acta Optica Sinica, 2013, 33(6): 631001
Category: Thin Films
Received: Jan. 18, 2013
Accepted: --
Published Online: May. 14, 2013
The Author Email: Yunchuan Liu (liuyuncuan@sina.com)