[1] [1] 1龚峰， 李康森， 闫超. 玻璃精密模压成形的研究进展［J］. 光学 精密工程， 2018， 26（6）：1380-1391. doi: 10.3788/ope.20182606.1380GONGF， LIK S， YANCH. Progress on precision glass molding［J］. Opt. Precision Eng.， 2018， 26（6）：1380-1391.（in Chinese）. doi: 10.3788/ope.20182606.1380

[2] X H LIU, T F ZHOU, L ZHANG et al. Fabrication of spherical microlens array by combining lapping on silicon wafer and rapid surface molding. Journal of Micromechanics and Microengineering, 28(2018).

[3] J Q XIE, T F ZHOU, Y LIU et al. Mechanism study on microgroove forming by ultrasonic vibration assisted hot pressing. Precision Engineering, 46, 270-277(2016).

[4] Y CHEN, L LI, A Y YI. Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process. Journal of Micromechanics and Microengineering, 17, 883-890(2007).

[5] T F ZHOU, R Z XU, B S RUAN et al. Fabrication of microlens array on 6H-SiC mold by an integrated microcutting-etching process. Precision Engineering, 54, 314-320(2018).

[6] [6] 6王之岳， 陈灶灶， 朱利民， 等. 微透镜阵列单点金刚石车削补偿技术［J］. 光学 精密工程， 2022， 30（7）：813-820. doi: 10.37188/OPE.20223007.0813WANGZH Y， CHENZ Z， ZHUL M， et al. Single point diamond turning and compensation for micro-lens array［J］. Opt. Precision Eng.， 2022， 30（7）：813-820.（in Chinese）. doi: 10.37188/OPE.20223007.0813

[7] Y YAN, P ZHOU, H P WANG et al. Thermal effect on poly（methyl methacrylate） （PMMA） material removal in the micromilling process. Polymers, 12(2020).

[8] S CHUNG, S PARK. Effects of temperature on mechanical properties of SU-8 photoresist material. Journal of Mechanical Science and Technology, 27, 2701-2707(2013).

[9] E SMITH. F(1989).

[10] G BOOTHROYD. Fundamentals of Metal Machining and Machine Tools(1975).

[11] J YAN. Ultraprecision cutting of photoresist/gold composite microstructures. CIRP Annals, 60, 133-136(2011).

[12] A KOBAYASHI, K SAITO. On the cutting mechanism of high polymers. Journal of Polymer Science, 58, 1377-1396(1962).

[13] K JAGTAP. Experimental investigation on the influence of cutting parameters on surface quality obtained in SPDT of PMMA. International Journal of Advanced Design & Manufacturing Technol(2014).

[14] K Q XIAO, L C ZHANG. The role of viscous deformation in the machining of polymers. International Journal of Mechanical Sciences, 44, 2317-2336(2002).

[15] J W CARR, C FEGER. Ultraprecision machining of polymers. Precision Engineering, 15, 221-237(1993).

[16] Y KAMADA, J W YAN. Machinability investigation for cellulose nanofiber-reinforced polymer composite by ultraprecision diamond turning. International Journal of Automation Technology, 15, 475-482(2021).

[17] C J ROBIN, A VISHNOI, K N JONNALAGADDA. Mechanical behavior and anisotropy of spin-coated SU-8 thin films for MEMS. Journal of Microelectromechanical Systems, 23, 168-180(2014).

[18] [18] 18杨其， 李光宪. 聚合物及其复合材料的微成型加工研究进展［J］. 高分子通报， 2013（9）：107-115.YANGQ， LIG X. Review on micro molding of polymers and polymer composites［J］. Chinese Polymer Bulletin， 2013（9）：107-115.（in Chinese）

[19] [19] 19解孟涛， 刘俊标， 王鹏飞， 等. 离心法曲面涂胶的胶层厚度研究［J］. 光学 精密工程， 2022， 30（1）：71-77. doi: 10.37188/OPE.2021.0477XIEM T， LIUJ B， WANGP F， et al. Research on resist-layer thickness by spin-coating on curved substrate［J］. Opt. Precision Eng.， 2022， 30（1）：71-77. （in Chinese）. doi: 10.37188/OPE.2021.0477

[20] [20] 20姜峰， 李宏伟. 金属切削有限元仿真软件AdvantEdge FEM用户手册［M］. 北京： 机械工业出版社， 2018.JIANGF， LIH W. User Manual of Finite Element Simulation Software AdvantEdge FEM for Metal Cutting［M］. Beijing： China Machine Press， 2018.（in Chinese）

[21] [21] 21褚金奎， 李双亮， 张然. SU-8胶光弹性性能显微测试［J］. 光学 精密工程， 2016， 24（3）： 547-552.CHUJ K， LISH L， ZHANGR. Microscopic test of photoelastic properties of SU-8 adhesive［J］. Opt. Precision Eng.， 2016， 24（3）： 547-552.（in Chinese）

[22] [22] 22龚江宏. 准静态纳米压痕的理论基础与数据分析［J］. 陶瓷学报， 2021， 42（2）：181-245.GONGJ H. Theoretical foundation and data analyses of quasi-static nanoindentation［J］. Journal of Ceramics， 2021， 42（2）：181-245.（in Chinese）

[23] GL OLIVEIRA, CA COSTA, S TEIXEIRA et al. The use of nano- and micro-instrumented indentation tests to evaluate viscoelastic behavior of poly（vinylidene fluoride） （PVDF）. Polymer Testing, 34, 10-16(2014).

[24] N CHOLLACOOP, K VLIET et al. Computational modeling of the forward and reverse problems in instrumented sharp indentation. Acta Materialia, 49, 3899-3918(2001).