Optics and Precision Engineering, Volume. 31, Issue 13, 1909(2023)
Ultra-precision cutting of photoresist mask for ultra-smooth surface
Fig. 11. SEM micrographs of photoresist SU8 under different cutting speeds
Fig. 14. SEM micrographs of photoresist SU8 under different feed rates
Fig. 18. SEM micrographs of photoresist SU8 under different depths of cutting
Fig. 22. SEM micrographs of photoresist SU8 under different rake angles
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Qiuyi LI, Tianfeng ZHOU, Jia ZHOU, Junjian HU, Bin ZHAO. Ultra-precision cutting of photoresist mask for ultra-smooth surface[J]. Optics and Precision Engineering, 2023, 31(13): 1909
Category: Micro/Nano Technology and Fine Mechanics
Received: Jan. 29, 2023
Accepted: --
Published Online: Jul. 26, 2023
The Author Email: ZHAO Bin (bin.zhao@bit.edu.cn)