Fig. 1. Dynamic properties of polymer as function of time

Fig. 2. Thermomechanical property test of photoresist SU8

Fig. 3. Simulation model of cutting

Fig. 4. Load-depth curve of photoresist SU8

Fig. 5. Stress-strain curve of photoresist SU8

Fig. 6. Schematic of machine tool movement

Fig. 7. Schematic diagram of face turning

Fig. 8. Effect of cutting speed on surface roughness

Fig. 9. Effects of cutting speed on cutting force

Fig. 10. Effects of cutting speed on cutting temperature

Fig. 11. SEM micrographs of photoresist SU8 under different cutting speeds

Fig. 12. Effect of feed rate on surface roughness

Fig. 13. Effects of feed rate on cutting force

Fig. 14. SEM micrographs of photoresist SU8 under different feed rates

Fig. 15. Effect of depth of cut on surface roughness

Fig. 16. Effects of depth of cut on cutting force

Fig. 17. Effects of depth of cut on cutting temperature

Fig. 18. SEM micrographs of photoresist SU8 under different depths of cutting

Fig. 19. Effect of rake angle on surface roughness

Fig. 20. Effect of rake angle on cutting force

Fig. 21. Effects of depth of cut on cutting temperature

Fig. 22. SEM micrographs of photoresist SU8 under different rake angles

Fig. 23. SEM micrographs of SU8 face turning

Fig. 24. Morphology of microlens array