Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

Xia Chen; Milan M. Milosevic; David J. Thomson; Ali Z. Khokhar; Yohann Franz; Antoine F. J. Runge; Sakellaris Mailis; Anna C. Peacock; Graham T. Reed

doi:10.1364/PRJ.5.000578

Photonics Research, Volume. 5, Issue 6, 578(2017)

Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

Xia Chen^*, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, and Graham T. Reed

Author Affiliations

Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK

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References(18)

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[11] J. J. Ackert, J. K. Doylend, D. F. Logan, P. E. Jessop, R. Vafaei, L. Chrostowski, A. P. Knights. Defect-mediated resonance shift of silicon-on-insulator racetrack resonators. Opt. Express, 19, 11969-11976(2011).

[12] G. T. Reed, M. M. Milosevic, X. Chen, D. J. Thomson. Trimming of ring resonators via ion implantation in silicon. Proc. SPIE, 10242, 102420Q(2017).

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[1] Greta De Paoli, Senta L. Jantzen, Thalia Dominguez Bucio, Ilias Skandalos, Christopher Holmes, Peter G. R. Smith, Milan M. Milosevic, Frederic Y. Gardes. Laser trimming of the operating wavelength of silicon nitride racetrack resonators[J]. Photonics Research, 2020, 8(5): 677

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Xia Chen, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, Graham T. Reed. Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides[J]. Photonics Research, 2017, 5(6): 578

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Paper Information

Category: Silicon Photonics

Received: Jun. 28, 2017

Accepted: Sep. 11, 2017

Published Online: Dec. 7, 2017

The Author Email: Xia Chen (xia.chen@soton.ac.uk)

DOI:10.1364/PRJ.5.000578

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology