Photonics Research, Volume. 5, Issue 6, 578(2017)

Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

Xia Chen*, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, and Graham T. Reed
Author Affiliations
  • Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK
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    Xia Chen, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, Graham T. Reed. Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides[J]. Photonics Research, 2017, 5(6): 578

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    Paper Information

    Category: Silicon Photonics

    Received: Jun. 28, 2017

    Accepted: Sep. 11, 2017

    Published Online: Dec. 7, 2017

    The Author Email: Xia Chen (xia.chen@soton.ac.uk)

    DOI:10.1364/PRJ.5.000578

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