Optics and Precision Engineering, Volume. 16, Issue 4, 636(2008)
Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2008, 16(4): 636
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