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Optics and Precision Engineering, Volume. 16, Issue 4, 636(2008)

Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining

[in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2008, 16(4): 636

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    Received: Oct. 29, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology