Optics and Precision Engineering, Volume. 16, Issue 4, 636(2008)
Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining
作者简介：孙立宁(1964-),男,博士生导师,长江学者,主要从事纳米级微驱动及微操作机器人、高速高精度机构、工业机器人技术、并联机器人、医疗机器人、微小型机器人、仿人手臂及机器人机构与控制方面的研究工作.E-mail:Insun@hit.edu.cn
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2008, 16(4): 636
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