Optics and Precision Engineering, Volume. 31, Issue 13, 1933(2023)
Development of 6-DOF micro-driving stage with sub-nano driving resolution
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Qiangxian HUANG, Baolin CHENG, Chibin ZHANG, Fan ZHANG, Liansheng ZHANG. Development of 6-DOF micro-driving stage with sub-nano driving resolution[J]. Optics and Precision Engineering, 2023, 31(13): 1933
Category: Micro/Nano Technology and Fine Mechanics
Received: Dec. 15, 2022
Accepted: --
Published Online: Jul. 26, 2023
The Author Email: ZHANG Liansheng (lszhang@hfut.edu.cn)