Optics and Precision Engineering, Volume. 31, Issue 13, 1933(2023)

Development of 6-DOF micro-driving stage with sub-nano driving resolution

Qiangxian HUANG... Baolin CHENG, Chibin ZHANG, Fan ZHANG and Liansheng ZHANG* |Show fewer author(s)
Author Affiliations
  • Anhui Province Key Laboratory of Measurement Theory and Precision Instruments, School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei230009, China
  • show less
    References(12)

    [1] [1] 1胡逸凡, 章海军, 倪凯佳. 三角放大型压电陶瓷微纳米驱动机构[J]. 光学 精密工程, 2022, 30(17): 2094-2099. doi: 10.37188/OPE.20223000.0223HUY F, ZHANGH J, NIK J. Mini-piezo-element drive microactuator based on triangular amplification[J]. Optics and Precision Engineering, 2022, 30(17): 2094-2099. (in Chinese). doi: 10.37188/OPE.20223000.0223

    [2] [2] 2张揽宇, 高健. 高速大行程宏微复合运动平台的振动抑制与精密定位方法研究[J]. 机械工程学报, 2020, 56(11): 131.ZHANGL Y, GAOJ. Vibration reduction mechanism and precision positioning method for high-speed large-stroke macro-micro composite motion stage[J]. Journal of Mechanical Engineering, 2020, 56(11): 131.(in Chinese)

    [3] [3] 3李冲, 童玉健, 梁康, 等. 压电驱动微型精密夹持机构设计与实验研究[J]. 中国机械工程, 2022, 33(11): 1302-1308, 1385. doi: 10.3969/j.issn.1004-132X.2022.11.006LICH, TONGY J, LIANGK, et al. Design and experimental study of piezoelectric actuated micro precision clamping mechanisms[J]. China Mechanical Engineering, 2022, 33(11): 1302-1308, 1385.(in Chinese). doi: 10.3969/j.issn.1004-132X.2022.11.006

    [4] [4] 4韩世泽, 杨栋, 胡晓宁, 等. 基于涡旋光与平面波干涉的微位移测量[J]. 光学 精密工程, 2022, 30(17): 2058-2066. doi: 10.37188/OPE.20223000.0219HANSH Z, YANGD, HUX N, et al. Micro-displacement measurement based on interference of vortex beams and plane wave[J]. Optics and Precision Engineering, 2022, 30(17): 2058-2066. (in Chinese). doi: 10.37188/OPE.20223000.0219

    [5] F CHEN. Design and test of a compact large-stroke dual-drive linear-motion system. Mechanical Systems and Signal Processing, 180, 109438(2022).

    [6] N CHEN, X F LIU. Dynamic modeling and attitude decoupling control for a 3-DOF flexible piezoelectric nano-positioning stage based on ADRC. Micromachines, 13, 1591(2022).

    [7] Z WU, Q XU. Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure. Mechanism and Machine Theory, 126, 171-188(2018).

    [8] Y TIAN, Y MA, F WANG et al. A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure. Sensors and Actuators A: Physical, 302, 111777(2020).

    [9] X G CHEN, Y M LI, Y L XIE et al. Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion. Mechanism and Machine Theory, 167, 104527(2022).

    [10] F X CHEN, W DONG, M YANG et al. A PZT actuated 6-DOF positioning system for space optics alignment, 2827-2838(2019).

    [11] [11] 11H-860六轴运动六足位移台[Z/OL]. https://www.pi-china.cn/zh_cn/products/parallel-kinematic-hexapods/h-860-high-dynamics-motion-hexapod-700891,2021. doi: 10.3969/j.issn.2095-509X.2021.08.003H-860 six-axis motion hexapod stage[Z/OL]. https://www.pi-china.cn/zh_cn/products/parallel-kinematic-hexapods/h-860-high-dynamics-motion-hexapod-700891,2021. (in Chinese). doi: 10.3969/j.issn.2095-509X.2021.08.003

    [12] [12] 12王耿, 魏维宁, 代军, 等. 线性偏摆复合型压电微动平台[J]. 光学 精密工程, 2022, 30(9): 1058-1070. doi: 10.37188/OPE.20223009.1058WANGG, WEIW N, DAIJ, et al. Linear yaw compound piezoelectric micro-motion platform[J]. Optics and Precision Engineering, 2022, 30(9): 1058-1070. (in Chinese). doi: 10.37188/OPE.20223009.1058

    Tools

    Get Citation

    Copy Citation Text

    Qiangxian HUANG, Baolin CHENG, Chibin ZHANG, Fan ZHANG, Liansheng ZHANG. Development of 6-DOF micro-driving stage with sub-nano driving resolution[J]. Optics and Precision Engineering, 2023, 31(13): 1933

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Dec. 15, 2022

    Accepted: --

    Published Online: Jul. 26, 2023

    The Author Email: ZHANG Liansheng (lszhang@hfut.edu.cn)

    DOI:10.37188/OPE.20233113.1933

    Topics