Fig. 1. Mechanical structure of micro-driving stage

Fig. 2. Structure of translational plate

Fig. 3. Structure of rotating plate

Fig. 4. Structure of supporting plate

Fig. 5. Schematic diagram of control system

Fig. 6. Interface of upper computer software

Fig. 7. Flowchart of upper computer control program

Fig. 8. Flowchart of lower computer control program

Fig. 9. Photo of line displacement test system

Fig. 10. Test result of X-axis displacement resolution

Fig. 11. Photo of angular displacement test system

Fig. 12. Test result of X-axis angular resolution