Optics and Precision Engineering, Volume. 31, Issue 13, 1933(2023)

Development of 6-DOF micro-driving stage with sub-nano driving resolution

Qiangxian HUANG... Baolin CHENG, Chibin ZHANG, Fan ZHANG and Liansheng ZHANG* |Show fewer author(s)
Author Affiliations
  • Anhui Province Key Laboratory of Measurement Theory and Precision Instruments, School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei230009, China
  • show less

    The micro-driving stage is the key component of high-precision positioning. The traditional work stage has few degrees of freedom (DOFs) and a low resolution; it struggles to adapt to the development needs of precision measurement and other fields. Thus, this paper presents a 6-DOF high-precision micro-driving stage and its experimental performance. The overall structure is hollow and is based on the series-parallel hybrid drive method. The movement of the six DOFs is distributed reasonably in the translational, rotating, and supporting plates. We also designed and developed a motion-control system for the micro-driving stage and motion-control software that can be used with it. Experimental results indicated that the linear displacement ranges of the X-, Y-, and Z-axis are better than 20, 20, and 37 μm, respectively, and the angular range is better than 39", 33", 27" in the pitch, roll, and yaw directions, respectively. The linear displacement resolution is better than 0.7 nm, and the angular displacement resolution is better than 0.1". Compared with the traditional work stage, the proposed 6-DOF micro-driving stage has the advantages of more DOFs and a higher resolution; thus, it is expected to be widely used in ultra-precision machining and lithography equipment.

    Tools

    Get Citation

    Copy Citation Text

    Qiangxian HUANG, Baolin CHENG, Chibin ZHANG, Fan ZHANG, Liansheng ZHANG. Development of 6-DOF micro-driving stage with sub-nano driving resolution[J]. Optics and Precision Engineering, 2023, 31(13): 1933

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Dec. 15, 2022

    Accepted: --

    Published Online: Jul. 26, 2023

    The Author Email: ZHANG Liansheng (lszhang@hfut.edu.cn)

    DOI:10.37188/OPE.20233113.1933

    Topics