Optics and Precision Engineering, Volume. 19, Issue 8, 1816(2011)

Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure

LI Si-hua1...2,*, XU Jing1, LONG Liang1,2, ZHONG Shao-long1 and WU Ya-ming1 |Show fewer author(s)
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    References(15)

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    [4] [4] KIM M, PARK J H, JEON J A, et al..High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes [J]. J. Micromech. Microeng, 2009, 19: 035014.

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    [2] LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400

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    LI Si-hua, XU Jing, LONG Liang, ZHONG Shao-long, WU Ya-ming. Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Optics and Precision Engineering, 2011, 19(8): 1816

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    Paper Information

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    Received: Aug. 24, 2010

    Accepted: --

    Published Online: Aug. 29, 2011

    The Author Email: Si-hua LI (lisihua@mail.sim.ac.cn)

    DOI:10.3788/ope.20111908.1816

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