Optics and Precision Engineering, Volume. 19, Issue 8, 1816(2011)
Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure
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LI Si-hua, XU Jing, LONG Liang, ZHONG Shao-long, WU Ya-ming. Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Optics and Precision Engineering, 2011, 19(8): 1816
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Received: Aug. 24, 2010
Accepted: --
Published Online: Aug. 29, 2011
The Author Email: Si-hua LI (lisihua@mail.sim.ac.cn)
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