In order to obtain a micro-mirror array with large torsional angles and large sizes under limited driving voltages, a novel micro-mirror array with a multi-terraced-plate structure was proposed and demonstrated based on the Micro-optoelectro mechanical System(MOEMS). The different characteristics of the electrostatic driver between multi-terraced-plate structure and parallel-plate structure were analyzed. The key fabrication process for the multi-terraced-plate structure was researched and a bulk micro-mechanical technology was used to fabricate a micro-mirror array with the multiterraced-plate structure.The obtained micro-mirror array contaning 52 micromirrors has the size in 600 μm by 200 μm, and a high fill-factor in excess of 97%. The test results show that the micro-mirror array achieves a maximum torsional angle about 1.1° under a driving voltage of 164 V,and the multi-terraced-plate structure greatly reduces the driving voltage as compared with the traditional parallel-plate structure.