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Optics and Precision Engineering, Volume. 19, Issue 1, 29(2011)

Design of beam shaping unit for deep ultraviolet lithographic illumination system

ZHAO Yang1,2、* and GONG Yan1
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  • 1[in Chinese]
  • 2[in Chinese]
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    ZHAO Yang, GONG Yan. Design of beam shaping unit for deep ultraviolet lithographic illumination system[J]. Optics and Precision Engineering, 2011, 19(1): 29

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    Paper Information

    Received: Jan. 13, 2010

    Accepted: --

    Published Online: Mar. 28, 2011

    The Author Email: Yang ZHAO (juventus-xx@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology