Sulfur hexafluoride (SF6) decomposition characteristic component detection is one of the most effective methods to judge the early latent fault of gas insulated equipment. The operation status of electrical equipment can be effectively evaluated by monitoring the type and concentration of decomposition characteristic components， so as to avoid insulation accidents. Raman spectrum analysis technology can realize the non-destructive detection of gas samples with single wavelength laser， and has excellent applicability and efficiency for the detection of SF6 decomposition characteristic components. In this paper， a gas molecular model is established based on the B3LYP method of density functional theory (DFT). The molecular model is optimized by 6-311G (2df， p) basis set， and the Raman frequency shift characteristics are simulated. At the same time， four kinds of experimental platform of Raman spectrum detection are built based on Raman spectrum characteristics. The results show that there is a good correlation between the calculated and measured values of DFT and NIST standard values. The characteristic peaks of CF4， CO， H2S and SO2 in the calculated values are 908.97， 2 221.11， 2 688.82， 1 175.24 cm-1 respectively， which lays a foundation for the qualitative and quantitative analysis of SF6 decomposition characteristic components by Raman spectroscopy.