High Power Laser and Particle Beams, Volume. 37, Issue 4, 055003(2025)

Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic

Jie Yang1、*, Xin Chen1, Chen Li1、*, Xiaoning Zhang2, Jialong He1, Ping Liu1, Zhen Qin1, Wei Zhao1, Gang Huang1, Jun Xiang1, Tiantao Li1, Jie Li1, Pan Dong1, and Tao Wang1
Author Affiliations
  • 1Institute of Fluid Physics, CAEP, Mianyang 621900, China
  • 2Department of Radiotherapy, Sichuan Clinical Research Center for Cancer, Sichuan Cancer Hospital & Institute, SichuanCancer Center, University of Electronic Science and Technology of China, Chengdu 610041, China
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    In this study, Cr2O3 was applied to the surface of Al2O3 ceramic via a dip-coating method. Subsequently, the final coated ceramic was obtained through high-temperature sintering. The effects of the Cr2O3 coating on material composition, microstructure, secondary electron emission coefficient, surface resistivity, and vacuum surface hold-off voltage performance were systematically investigated. The results indicate that the surface of the coated ceramic appears dark red, representing a mixture of three materials: Al2O3-Cr2O3 solid solution, MgAl2O4, and Cr2O3. Compared to the Al2O3 ceramic, both the grain size and pore size on the surface are reduced, and the homogeneity of the grain size is significantly enhanced. After high-temperature sintering, Al and Cr diffuse into each other. Additionally, a small amount of glass phase, likely migrating from the ceramic substrate, is detected in the coating. Owing to the high-temperature sintering of the Cr2O3 coating, the secondary electron emission coefficient is reduced to 3.22, and the surface resistivity is also lowered to 4.52×1011 Ω. Furthermore, the vacuum surface hold-off electric field strength of the coated ceramic increases to 34.44 kV/cm, which is approximately 108% higher than that of the Al2O3 ceramic.

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    Jie Yang, Xin Chen, Chen Li, Xiaoning Zhang, Jialong He, Ping Liu, Zhen Qin, Wei Zhao, Gang Huang, Jun Xiang, Tiantao Li, Jie Li, Pan Dong, Tao Wang. Effect of Cr2O3 coating sintered at high temperature on the vacuum surface hold-off voltage performance of Al2O3 ceramic[J]. High Power Laser and Particle Beams, 2025, 37(4): 055003

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    Paper Information

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    Received: Aug. 26, 2024

    Accepted: Mar. 7, 2025

    Published Online: May. 15, 2025

    The Author Email: Jie Yang (yangjie_sc@126.com), Chen Li (lic05@tsinghua.org.cn)

    DOI:10.11884/HPLPB202537.240275

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