The laser-induced breakdown spectroscopy (LIBS) technique is a fast,non-contact method with no need for any sample preparation, and can be carriedout under various atmospheric conditions. These properties make LIBS applicableto process control in metallurgy. In the present paper, a series of high alloysteel GBW01605—01609 samples were determined by laser induced plasmaspectroscopy, based on a Nd∶YAG Q-switched solid laser with wavelength 1 064 nmas an excitation source and CCD as detector. Experimental study on theinteraction between laser and high alloy steel samples was completed. The effectson LIBS in high alloy steel such as observation distance and laser power densitywere systematically studied. The time-resolved spectrum of LIBS was alsoinvestigated. The optimum experiment conditions for the application of LIBS tothe trace analysis in high alloy steel were obtained firstly.alloy steel(O8A3260301)资助