Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 871(2024)
Design and Simulation Analysis of Surface Acoustic Wave Cryogenic Sensors with Double-Electrode Interfingered Transducer
A 128°YX-cut lithium niobate (LiNbO3) delay-line-type surface acoustic wave (SAW) temperature sensor with a dual-electrode interdigitated transducer (IDT) was designed to meet the demand for temperature measurements in low-temperature, harsh environments. A temperature-sensor model was built using COMSOL software, and the optimal model parameters were determined. The sensor was tested within a temperature range of -196 ℃ to 100 ℃. According to the simulation results, the electromechanical coupling coefficient of the sensor with the dual-electrode finger structure was 5.35%. Moreover, the sensor’s resonance frequency exhibits a strong linear relationship with temperature, with a temperature sensitivity of 26.2 kHz/℃ and a frequency temperature coefficient of -83.4×10-6/℃, demonstrating the reliability of LiNbO3 in low-temperature environments.
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YE Mengying, CUI Yongjun, WANG Hongliang. Design and Simulation Analysis of Surface Acoustic Wave Cryogenic Sensors with Double-Electrode Interfingered Transducer[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 871
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Received: Jul. 30, 2024
Accepted: Feb. 13, 2025
Published Online: Feb. 13, 2025
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