The characteristic of the light propagation across the wide angle crossed waveguide is analyzed using the finite difference beam propagation method (FDBPM). Padé approximation is used to deal with the wide angle problem and the transparent boundary condition is used to deal with the optical reflection at the boundary. Through calculating the finite difference equations using the pursue after method, the relationship between the propagation loss and the intersection angle has been obtained. On this basis, the crossed silica waveguides are fabricated on silicon substrate by low pressure chemical vapor deposition method. Experiments show that the presented FDBPM has good accuracy and can be used to analyze wide angle crossed waveguides.