Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 590(2025)
Analysis and Optimization of the Self-Excited Resonant Pressure Sensor System Based on AGC Closed-Loop Control
Resonant pressure sensors are characterized by high accuracy and strong impact resistance;however,their stability and ability to respond rapidly to external pressure variations remain challenging. This study investigated electrostatic excitation/piezoresistive detection resonant pressure sensors and developed a nonlinear closed-loop self-excitation system model based on automatic gain control(AGC)technology. The open-loop transfer function of the system was derived,and the dominant poles were determined using the resonator parameters and secondary poles governed by the low-pass filter parameters within the AGC loop. To reconcile the conflicting requirements of the low-pass filter design,loop stability,and system startup speed for the secondary poles,we propose a multi-path feedforward compensation technique. This innovation reduces the system stabilization time to 150 ms while eliminating the overshoot in both the excitation waveform and the phase shifter’s output waveform during system startup. The proposed approach significantly enhances system stability,and the experimental results demonstrated a measurement accuracy exceeding 0.03% FS.
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HUANG Jing, XIANG Lu, CHEN Meng, YU Hua. Analysis and Optimization of the Self-Excited Resonant Pressure Sensor System Based on AGC Closed-Loop Control[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 590
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Received: Feb. 28, 2025
Accepted: --
Published Online: Jul. 11, 2025
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