Chinese Journal of Lasers, Volume. 39, Issue 6, 607001(2012)

Microstructure and Triobological Behavior of CNx Films Deposited by Iterative Pulsed Laser Deposition

Zheng Jinxiang1、*, Zheng Xiaohua1, Shen Tao1, Yang Fang′er1, and Song Renguo2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    The CNx films are deposited on monocrystalline silicon substrates by pulsed laser deposition (PLD) technique with different laser fluxes and CNx coating as the target. The morphology,composition and microstructure of the films are characterized by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) respectively. The tribological behavior is investigated using a ball-on-disk tribometer in atmosphere (RH=48%~54%). The results show that an introduction of iterative PLD technique can improve the nitrogen content of the CNx films remarkably. With the increase of laser flux from 5 J/cm2 to 10 J/cm2, the percentage of N-sp2C bonding increases and the nitrogen atom fraction of the CNx film increases from 23.8% to 29.9%. A decreased percentage of N-sp3C and sp3C-C bonding of the CNx film are observed and the wear rate of CNx film increases from 2.1×10-15 m3/(N·m) to 9.0×10-15 m3/(N·m). The friction coefficient of the films ranges from 0.15 to 0.23. Compared with the others, the film deposited at laser flux 5 J/cm2 exhibites an optimal tribological performance.

    Tools

    Get Citation

    Copy Citation Text

    Zheng Jinxiang, Zheng Xiaohua, Shen Tao, Yang Fang′er, Song Renguo. Microstructure and Triobological Behavior of CNx Films Deposited by Iterative Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2012, 39(6): 607001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: materials and thin films

    Received: Jan. 16, 2012

    Accepted: --

    Published Online: May. 2, 2012

    The Author Email: Zheng Jinxiang (zhengjinxiang0570@163.com)

    DOI:10.3788/cjl201239.0607001

    Topics