In order to analyze the damage mechanism of materials from the microscopic point of view， quickly and accurately measure the micro morphologies of the surface， the white light interference technology is analyzed theoretically. Two different types of material damage morphologies， such as wear spots and pits， are measured and studied by using white light interference technology. The results show that the white light interferometer can accurately measure the two-dimensional and three-dimensional topographies and depth data of wear spots and pits. The depth of wear spot is 45.68 μm， and the maximum pit depth is 5.14 μm. The white light interferometer is suitable for testing the three-dimensional morphology and data of the damaged surface. The technology can be used to quickly and accurately measure the micro surface morphology of materials， which is of great significance for further understanding of behavior and life prediction of materials.