Chinese Journal of Lasers, Volume. 23, Issue 10, 893(1996)
Deposition Rate of IBS Deposited Pt Films at Different Substrate Temperatures
The investigation of the paper includes the measurements of the deposition rate ofPt films deposited by ion- beam sputtering at different deposition parameters andtemperatures. It was found that deposition rate increases with the increase of the substratetemeperature. Using the physical and chemical adsorption theory, we discussed thisphenomenon.
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[in Chinese], [in Chinese], [in Chinese]. Deposition Rate of IBS Deposited Pt Films at Different Substrate Temperatures[J]. Chinese Journal of Lasers, 1996, 23(10): 893
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