ZrO2-SiO2 organic-inorganic hybrid optical waveguide materials were synthesised by the sol-gel process. Refractive index of the hybrid films was adjusted with different amounts of ZrO2 for the use as guiding layers (refractive index ng≈1.497), buffer laters and clading layers (nb=nc≈1.479). The hybrid films were deposited on single-crystal silicon wafers (?肌?10 cm) by sol-gel spin-coating. The guiding layers were UV-photosensitive and so UV-patternable. Optical propagation loss in the slab waveguides was measured to be about 0.8 dB/cm at 632.8 nm, by the cut-back method, using prism-coupling. The buried channel waveguides were also prepared by patternning the guiding layers of the slab waveguides with UV-curing and rinsing with isopropanol. Propagation loss in the buried channel waveguides was also measured by the cut-back method, using butt-coupling. The loss was lower than the measurement error, or less then 0.1 dB/cm at 632.8 nm. The near-field patterns were observed, and absorption spectrum of the hybrid material for the guiding layers was measured.