Thyratron-based excimer lasers are not available for some fields where high pulse repetition rate is desired. A thyratron-free alternative is to introduce solid state pulsed power module (SSPPM) which combines solid-state switch with magnetic switch and promises an infinite lifetime. A SSPPM-based ArF excimer with metal-ceramic configuration was designed. Corona pre-ionization was employed to achieve a homogeneous and clean pre-ionization. A 10-14 kV pulse was generated by the SSPPM for electrodes discharge. The risetime of the pulse was about 150 ns. Under the pumping density of 7.6 MW/cm3 the maximum laser output energy of 11 mJ was obtained at 193 nm. The maximum repetition rate was up to 300 Hz. This laser may satisfy the applications such as laser vision correction,dermatological treatment and spectroscopy.