An exeimer laser beam was used to irradiate superconducting Y-Ba Cu oxide pellet to make the elements of the target sputter and deposit as films on the substrates placed parallelly to the pellet. With appropriate post-annealing, the deposited films were of superconducting transition above 77 K, and the films with zero resistance temperature of 85 K were prepared. The effects of deposition conditions and post-annealing procedure on the properties of the thin film were discussed.