Journal of Infrared and Millimeter Waves, Volume. 24, Issue 6, 459(2005)
APPLICATION OF LASER BEAM INDUCED CURRENT FOR TECHNOLOGY DETECTING OF HgCdTe TWO-COLOR DETECTOR
The application of laser beam induced current(LBIC)for the technology detecting of Mercury-Cadmium-Telluride(HgCdTe)infrared two-color detector was presented.By LBIC test,it ws found that the area of n-type region derived from p-type HgCdTe having been implanted by Boron ion was larger than the area to be implanted,and the precise transversal distribution of this n region was also obtained.At the same time,the transversal distributions of plasma etching induced n-type doping HgCdTe from p-type material among the side wall of etched mesa was obtained,and the relation between the transversal width of this n-type region and the energy of etching plasma was also achieved.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. APPLICATION OF LASER BEAM INDUCED CURRENT FOR TECHNOLOGY DETECTING OF HgCdTe TWO-COLOR DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2005, 24(6): 459