Chinese Journal of Lasers, Volume. 44, Issue 6, 603002(2017)
Development of Wide-Band Low-Noise Filter for Solar Blind Detection System
In order to meet the technical requirements of the solar blind detection system, a kind of optical filter is developed, which can realize high transmittance in the ultraviolet light field (200-270 nm) and deep cutoff from near ultraviolet to near infrared (300-1200 nm). By analyzing the optical properties of the material, combining optical film theory and optimizing the film system structure, the film system combined with medium and metal is designed. The metal film is deposited by electron beam heating and evaporation. Through the experiment on the deposition rate, the control error of the film thickness is effectively reduced under the premise of ensuring the optical properties of the metal. By using the reverse inversion method and the film sensitivity analysis, the process parameters of the resonant layer are optimized, and the control error of the resonant layer is effectively reduced. The average transmittance of the filter film is 51.21% in the range of 200-270 nm, and the average transmittance in the inhibition region of 300-1200 nm is 0.90%.
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Fu Xiuhua, Guo Kai, Xiong Shifu, Zhang Jing, Sun Bing, Jiang Hongyan. Development of Wide-Band Low-Noise Filter for Solar Blind Detection System[J]. Chinese Journal of Lasers, 2017, 44(6): 603002
Category: materials and thin films
Received: Jan. 22, 2017
Accepted: --
Published Online: Jun. 8, 2017
The Author Email: Xiuhua Fu (goptics@126.com)