Chinese Journal of Lasers, Volume. 11, Issue 6, 359(1984)
[in Chinese]
By 150 W CW CO2 laser beam irradiation, the elimination of the oxidation stacking faults in silicon has been observed and its mechanism is discussed.
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Fu Rulian, Kai Guiyun, Yang Mengyan, Geng Xikun. [J]. Chinese Journal of Lasers, 1984, 11(6): 359
Paper Information
Category: laser devices and laser physics
Received: Aug. 12, 1983
Accepted: --
Published Online: Sep. 4, 2012
The Author Email:
CSTR:32186.14.
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