Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 45(2023)
Study on Composite Control Method of Piezoelectric Ceramic Displacement Platform
A composite control method with feedforward compensation was adopted to address the problem that the system positioning accuracy of the piezoelectric ceramic (PZT) displacement platform was degraded due to the hysteresis characteristics.First, a segmented Prandtl-Ishlinskii (P-I) model was proposed for the establishment of the feedforward model, and the hysteresis model of the constructed platform was inverted. The error rate of the model was within 0.7%.Then, a series proportional integral (PI) analog circuit, a filter circuit and a detection circuit were designed for the closed-loop, which further improves the response speed and control accuracy of the control system. The experimental results show that the average absolute error of the composite control system based on feedforward compensation is 0.039 μm and the maximum error is 0.16 μm for the piezoelectric ceramic displacement platform at the frequency of 100 Hz and the stroke of 0-140 μm.Compared with feedforward control only, its control accuracy is improved by 73.76%.
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HAN Zhen, LIU Yuetao, LI Zhihe, CAI Ruyan, FU Lianzhuang, QU Dongming. Study on Composite Control Method of Piezoelectric Ceramic Displacement Platform[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 45
Received: Jul. 1, 2022
Accepted: --
Published Online: Apr. 7, 2023
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