OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 21, Issue 1, 108(2023)
Packaging of Semiconductor Single-Photon Avalanche Photodiodes(SPAD)
Semiconductor single-photon avalanche photodiodes can carry out weak signals detections and have important applications in quantum communications, lidar and atmospheric detection. Although the performance of semiconductor single-photon avalanche photodiodes mainly depends on the design of detector chip, chip fabrication technology and design of peripheral matching circuit, the subsequent packaging technology also has an important influence on its performance. This paper focuses on the packaging development of semiconductor single-photon avalanche photodiodes over the years. The corresponding packaging forms and technologies briefly are introduced, as well as the impact of packaging on the performance of avalanche photodiodes. Finally a prospect for the packaging development of semiconductor single-photon avalanche photodiodes is presented.
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LIU Jie, WANG Bing, MA Tao, LI Qi, ZUO Biao. Packaging of Semiconductor Single-Photon Avalanche Photodiodes(SPAD)[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2023, 21(1): 108
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Received: Jun. 24, 2022
Accepted: --
Published Online: Mar. 22, 2023
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CSTR:32186.14.