Chinese Journal of Lasers, Volume. 28, Issue 3, 249(2001)
Calculation of Interfacial Roughness of Multilayers
This paper gives asimple formula for calculating the roughness of multilayer by using the small angle X-raydiffraction curves of the samples. The differences of the calculated values of roughnessfrom the formula for the different pairs of peaks of a diffraction curve of the sample ordifferent samples are very little, but these differences from B. Abples′ formula are considerably large.The calculated results are also in good conformity with the measured values reported.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation of Interfacial Roughness of Multilayers[J]. Chinese Journal of Lasers, 2001, 28(3): 249