Piezoelectrics & Acoustooptics, Volume. 42, Issue 2, 273(2020)

Nonlinear Correction of Piezoelectric Ceramic in Fizeau Interferometer

WANG Fang1... LU Qingjie1, and HAN Sen12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    The phase shifter is the core component of Fizeau interferometer and the key component is piezoelectric ceramic actuator. However, the piezoelectric ceramic actuator has hysteresis and nonlinear characteristics which seriously affects the precision of the phase shifter and adversely affects the surface shape detection of optical components. Therefore, a control system of PZT is designed, which uses the National Instruments (NI) dynamic data acquisition equipment (PCIe 6321), LabVIEW system and voltage amplifier to form a voltage drive system to generate drive signals, and uses the resistance strain gauge and Wheatstone bridge as the displacement sensor to collect the displacement. Secondly, a polynomial model is established and a feedforward open loop correction algorithm based on the PZT transfer function are proposed to model and correct the PZT. Finally, the algorithm was verified on the experimental system. The experimental results show that the phase shift error of the phase shifter can be improved, and the difference between uncorrected and corrected displacement is less than 10% .The system can effectively correct the hysteresis nonlinear characteristic of piezoelectric ceramic actuator, so as to reduce the influence of nonlinear phase shift on the measurement results and meet the high precision requirements of detecting optical element surface shape and system.

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    WANG Fang, LU Qingjie, HAN Sen. Nonlinear Correction of Piezoelectric Ceramic in Fizeau Interferometer[J]. Piezoelectrics & Acoustooptics, 2020, 42(2): 273

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    Paper Information

    Received: Oct. 15, 2019

    Accepted: Jun. 12, 2025

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10-11977/j.issn.1004-2474.2020-02-028

    CSTR:32404.14.202002028

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