ObjectiveMicro-displacement measurement techniques are designed to detect and quantify tiny movements, typically in the range of micrometers to millimeters. This technology plays a vital role in many fields such as precision engineering, materials science, bioengineering and nanotechnology. Laser interferometry has been widely concerned for its high precision, high sensitivity, non-contact and large measuring range. Because of its high sensitivity and high resolution, vortex beam interference technology has been deeply studied and applied in various precision measurement systems. However, due to the limitation of the frame rate of the planar array detector, it is difficult to improve the measurement speed effectively. In order to improve the measurement efficiency, a rapid measurement method for displacement based on dual PD sampling and vortex light interference is proposed.
MethodsBased on the vortex beam interference principle (Fig.1), the impact of replacing the two-dimensional array detector with PD on the vortex beam interference pattern is discussed, especially the relationship between the number of PD, the size of the target surface and its geometric layout, which is verified by simulation. Therefore, an experimental system was established, and the interference signals collected by PD were de-DC, normalized and unwrapped (Fig.3). By analyzing the relative error of the piezoelectric ceramic displacement test results and the standard deviation of the motor displacement test results, the performance of the system in terms of high precision and speed is verified.
Results and DiscussionsThe simulation results show that the PD target surface size has no direct impact on the final measurement results, and the non-orthogonal error introduced by the geometric layout of PD can be effectively corrected by the correction algorithm, and the relative error is reduced from 1.5% to 0.2% (Fig.5), which significantly improves the accuracy of the measurement scheme. In the experiment, an improved Mach-Zehnder optical path (Fig.7) was used, PZT was set as a closed-loop working mode, and the displacement was set as 50 μm. The displacement measured experimentally is 50.021 μm and the relative error is 0.042%, which verifies the high precision of the system (Fig.8). In addition, the PZT was replaced by a large-stroke motor. The displacement was set at 10mm, the displacement speed was 2.6 mm/s, and 10 repeated experiments were carried out. The repeatability error in the motor is 2 μm, which verified the reliability of the system in the rapid measurement of large-scale displacement (Fig.11).
ConclusionsBased on the high sensitivity and high resolution of the interference patterns produced by vortex light and planar waves, the Mach-Zehnder interference optical path has been improved by replacing the traditional two-dimensional array detector with a high-speed photodetector. A rapid measurement method for large-range displacements has been proposed; it constructs a dual PD experimental system with a layout of 202.5°. In the experiment with a measuring range of 50 μm, the calculated displacement is 50.021 μm with only a 21 nm error compared with the actual displacement, which verifies the high precision of the scheme. In addition, the experimental system uses the motor to realize the rapid measurement of a wider range of displacement. The experimental results show that the measurement range of the scheme can reach at least millimeter level, and the measurement speed can reach 2.6 mm/s, which can effectively realize the rapid measurement at millimeter level. Moreover, the system has simple structure, strong anti-interference ability and certain universality. It is worth noting that the maximum displacement speed that can be measured by the acquisition card and PD in this paper is 316.5 mm/s, and the coherence length of the laser is more than 100 m, so the method proposed in this paper has the ability to measure the speed above millimeter level and the measurement range above meter level.