Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 31, Issue 3, 350(2004)

[in Chinese]^*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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A novel LD-SPM interferometer, which can be used to measure micro-vibrations with a high accuracy in real time, is proposed. In this paper, a composite light source is employed to decrease the measurement errors caused by the light-intensity changes. Experiments verify the usefulness of the interferometer.

Keywords

interferometer micro-vibration real-time measurement measurement instrument

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement[J]. Chinese Journal of Lasers, 2004, 31(3): 350

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Paper Information

Category: laser devices and laser physics

Received: Nov. 4, 2002

Accepted: --

Published Online: Jun. 12, 2006

The Author Email: (ldl@mail.siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology